silicon nitride
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- The recycling acquisition of silicon waste from photovoltaic industry has gained an increasing attention nowadays, since more than 50% of high purity material ends up as kerf during the wafer cutting process.
- Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses.
- Self-Aligned Double Patterning (SADP) has been used as a promising solution for advanced nodes (sub-14nm) because of fewer overlay problems and better process tolerance.
- Plasma-enhanced chemical vapor deposited silicon nitride (SiNx) films are extensively used as passivation material in the solar cell industry.
- Ceramic cutting materials like aluminum oxide and silicon nitride are used for machining of metallic materials.
- Total ionizing dose effects are predominantly due to hole traps at the Si/SiO2 interface at the shallow trench isolation (STI) and buried oxide.
- Silicon nitride (Si3N4) is one of the most important engineering materials.
- Stress is a long standing challenge for the applications of silicon (Si) anodes in lithium (Li) ion batteries.
- Silicon-on-insulator (SOI) is a promising alternative to bulk silicon as ultra shallow junction depths have begun to shrink below 50 nm.