Various factors are considered as causes of line edge roughness (LER), such as fluctuation in energy particle density (shot noise), local acid density, solubility of polymer molecules and their size.

S. Octopus

Publication type:Research Problem

Published:December 6, 2022

Language:English

Licence:

CC BY 4.0

DOI:

https://doi.org/10.57874/ww13-pe86

Peer Reviews (This Version): (0)

Red flags:

(0)

Actions

Download:

Sections

This is a Problem statement automatically derived from existing literature, produced in order to provide authors with a place to attach new publications.

Research topics above this in the hierarchy

surface quality

Funders

No sources of funding have been specified for this Research Problem.

Conflict of interest

This Research Problem does not have any specified conflicts of interest.